SEMICONDUCTOR / RELIABILITY
The Importance of Electrostatic Discharge (ESD) Standards in Semiconductor and Electronics Manufacturing
Electrostatic Discharge (ESD) is a critical concern in the semiconductor and electronics industries.
As semiconductor devices have become more complex and delicate, even a small electrical discharge can result damage, one of the main failure modes for Semiconductor devices.
The implementation of ESD standards, such as IEC 61340-5-1 or ANSI/ESD S20.20 and JEDEC JS-001, enable manufacturers to provide some protection to their devices, maintain product quality, and enhance the longevity and reliability of their products.
These standards define the necessary procedures for establishing effective ESD control programs, including guidelines for Handling, Environment, grounding and packing. Adhering to these standards is crucial to avoid costly failures and maintain a high production yield.
Relationship between Standards
There are numerous Electrostatic Discharge (ESD) standards designed to protect sensitive electronic components, and while each standard has a specific focus, they often overlap and complement each other. These standards provide a complete approach to ESD protection, ensuring that manufacturing processes, environments, and equipment meet strict guidelines to minimize the risk of ESD damage.
System Standards and their Frameworks
- IEC 61340-5-1: This globally recognized standard sets the foundation for establishing comprehensive ESD protection and control requirements. It provides guidelines for handling, processing, and packaging sensitive electronic devices.
- ANSI/ESD S20.20: Widely used in the United States, especially in manufacturing environments, this standard is the counterpart to IEC 61340-5-1. It outlines detailed administrative and technical requirements for developing an effective ESD control program, covering areas like grounding and personnel safety.
Together, these standards form an approach to ESD protection, where programs must ensure that processes, environments, and equipment conform to the guidelines to minimize risks.
Main Framework Components
ESD Coordinator Role (click for more)
- The ESD Coordinator is pivotal in the implementation, maintenance and enforcement of an organisation’s ESD control program, as required by system standards IEC 61340-5-1 & ANSI/ESD S20.20. This defined individual ensures that the ESD program is properly developed, followed, and continually improved.
Key Responsibilities Include:
- Developing and Implementing the ESD Control Program: The ESD coordinator ensures that the control measures meet the requirements of the relevant ESD standards and are effectively applied in the workplace.
- Monitoring Compliance: Regular checks and assessments are performed by the ESD coordinator to ensure that all processes, materials, and personnel comply with the standard. This includes reviewing grounding systems, ESD-sensitive equipment, and static-safe workstations.
- Training Oversight: The ESD Coordinator is responsible for organizing training for personnel involved in handling ESD-sensitive items, ensuring that the workforce is knowledgeable about best practices.
- Continuous Improvement: ESD coordinators must stay updated on new ESD control technologies and standards to ensure that their company’s program evolves with advancements.
Training (click for more)
- Training is one of the core components of the ESD control system as laid out by IEC 61340-5-1 and ANSI/ESD S20.20. Without effective training, employees handling electrostatic discharge sensitive devices (ESDS) may inadvertently cause damage during manufacturing or service processes.
- Content of Training Programs: Training typically covers the basics of ESD, understanding how it occurs, recognizing ESDS, and learning the correct procedures to mitigate it (e.g., using grounding straps, following safe handling procedures).
- Who Requires Training: All personnel who come into contact with ESDS devices—whether in production, service, engineering or quality assurance—must undergo regular ESD training. Additionally, training is mandatory for new hires, and periodic refresher courses should be scheduled.
- Training Verification: ESD coordinators must ensure that all employees are adequately trained and that their knowledge is periodically assessed through evaluations or practical demonstrations.
EPA Areas – Electrostatic Protected Areas (click for more)
- Electrostatic Protected Area (EPA): A zone within which all electrostatic-sensitive devices (ESDS) are handled under strict ESD control measures to prevent damage.
- Physical Layout: EPAs are typically equipped with grounded workstations, ESD-safe flooring, ionizers, and controlled environments to minimize the risk of static build-up.
- Control Measures: Within the EPA, employees must wear appropriate ESD-safe clothing, including grounded wrist straps and footwear. All tools, packaging, and furniture in the area should also be ESD-protected.
- Access Control: EPAs usually have restricted access, and only personnel who have undergone ESD training and understand the safe handling procedures for ESDS devices are allowed inside.
Grounding (click for more)
- Grounding: Fundamental to any ESD control program and is emphasized heavily in system standards like IEC 61340-5-1 or ANSI/ESD S20.20. It is the most effective method for controlling electrostatic charges and preventing ESD charge build-up events.
- Grounding Systems: These systems are designed to ensure that all conductive surfaces, including personnel, tools, and workstations, are kept at the same electrical potential to prevent static discharges. Grounding wrist straps, heel straps, and mats are common tools.
- Personnel Grounding: For personnel working with ESDS items, grounding devices like wrist straps, foot straps, and grounding footwear are mandatory. These ensure that any electrostatic charge on a person is safely discharged to the ground.
- Equipment and Workstation Grounding: All workstations, tools, and equipment within the EPA must be grounded. This prevents static build-up on surfaces that come into contact with ESDS devices.
- Regular checks: Grounding systems are required to ensure they are functioning properly, and grounding resistance must be maintained at levels prescribed by the standards (e.g., less than 1 megohm for wrist straps).
Regular Assessment/Audit (click for more)
- Regular assessments: Vital to ensuring ongoing compliance with ESD system standards. These assessments are structured to evaluate the effectiveness of the ESD control program and identify areas for improvement.
- Internal Audits: These are typically conducted by the ESD coordinator or a dedicated internal audit team. Audits should verify that all ESD protective measures, including grounding, ionization, and equipment checks, are in place and functioning as required.
- Third-Party Audits: For industries with strict compliance needs, third-party audits might be necessary to certify compliance with international standards like IEC 61340-5-1 or ANSI/ESD S20.20. External audits provide unbiased evaluations and are sometimes required for customers or regulatory bodies.
- Frequency: The frequency of audits can vary, but a best practice is to conduct at least annual audits, with more frequent checks in high-risk environments. Audits should cover all areas of the ESD control program, including training, equipment, EPA areas, and grounding systems.
Semiconductor Device Qualification
- AEC-Q100-002 the more stringent Automotive standard refers to the JEDEC JS-001: This standard focuses on testing semiconductor devices using the Human Body Model (HBM), simulating static discharges from direct human contact. It’s essential for qualifying semiconductor robustness during handling and manufacturing.
- AEC-Q100-011 Automotive standard refers to the JEDEC JS-002: Targets semiconductor testing using the Charged Device Model (CDM), simulating discharges that occur when a charged device touches a grounded surface. It ensures semiconductor devices can withstand these stress events.
Both HBM and CDM tests are essential as they mirror real-world ESD scenarios that semiconductors encounter during manufacturing, shipping, and handling. The JEDEC JS-001 (HBM) and JS-002 (CDM) standards provide the methodology for these tests, ensuring that devices can withstand potential discharges without failing
The Role of TLP Testing
AEC (JEDEC) HBM & CDM provide a Pass or Fail status at the level they are tested, this demonstrates conformance.
Transmission Line Pulse (TLP) testing is another important method used in ESD qualification, particularly for system-level robustness. TLP testing simulates ESD events and measures the electrical robustness of a semiconductor devices and PCB assemblies, providing data on current-voltage characteristics, which can be used to predict device behaviour during real-world ESD events.
Unlike HBM and CDM, TLP offers detailed insights into device behaviour and failure modes, helping improve System Efficient ESD Design (SEED).
TLP Notes / Tips / considerations. (Click for More)
Before an ESD HBM/CDM conformance check, determine the extent of ESD protection. During the development phase carry out an early TLP test to determine extent of protection.
HBM/CDM/TLP results will not replicate each other, they are different test methods and will not directly relate, however they are likely to have some relationship.
A Unified Approach to ESD Protection
Together, these system standards along with device qualification & defined method standards provide a cohesive framework for minimizing ESD risks during processing. By adhering to these standards, organizations ensure that their processes, environments, and equipment are equipped to handle ESD-sensitive devices, reducing the potential for damage and enhancing overall product reliability.
It is a important if not more so, to apply these methods & controls to non-production areas,
Consider Examples
A development bench that damages devices during evaluation, setting back release timescales, whilst measurements are investigated, resolved and repeated.
Qualification handling that has a high failure rate that needs resolving and re-qualification, prior to Customer acceptance.
Customer Confidence in a Failure Analysis laboratory that is unable to find the root cause, due to devices damaged during initial inspection.
Find the relevant ESD Standard
List of ESD Standards
| Std | Rev | Title | Scope | Application | Download Link | |
|---|---|---|---|---|---|---|
| ANSI/ESD S20.20 | 2021 | Protection of Electrical and Electronic Parts, Assemblies and Equipment (Excluding Electrically Initiated Explosive Devices) | Comprehensive framework for ESD control programs, covering elements like personnel grounding and packaging. | Requirements – Electronics manufacturing, semiconductor industries, general industry | STG: ANSI/ESD S20.20-2021 – (registration required) | |
| ANSI/ESD TR20.20 | 2016 | Handbook For The Development Of An Electrostatic Discharge Control Program For The Protection Of Electronic Parts, Assemblies, And Equipment | Developing, implementing, and monitoring an electrostatic discharge control program in accordance with ANSI/ESD S20.20. This handbook applies to activities that include manufacturing, processing, assembling, installing, packaging, labeling, servicing, testing, inspecting, or otherwise handling electrical or electronic parts, assemblies, and equipment susceptible to damage by electrostatic discharges greater than or equal to 100 volts human body model (HBM), 200 volts charged device model (CDM), and exposure to charged isolated conductors. | Requirements – Electronics manufacturing, semiconductor industries, general industry | ESD-TR20.20 – 2016 (registration required) | |
| IEC 61340-5-1 | 2024 | Protection of electronic devices from electrostatic phenomena – General requirements | Provides requirements for an ESD control program, including handling, processing, and packaging of electronic devices. | Requirements – Global electronics industries, manufacturing, aerospace, medical devices, automotive | IEC 61340-5-1 (registration required) | |
| ANSI/ESD S541 | 2019 | For the Protection of Electrostatic Discharge Susceptible Items – Packaging Materials. | covers packaging materials for the protection of electrostatic discharge susceptible items. | Control – Electronics manufacturing, general industry | ANSI/ESD S541 (registration required) | |
| ANSI/ESD S6.1 | 2019 | For the Protection of Electrostatic Discharge Susceptible Items – Grounding | Covers grounding and bonding to prevent electrostatic discharge for susceptible items in protection areas. | Control – Electronics manufacturing, general industry | ANSI/ESD S6.1 (registration required) | |
| ANSI/ESD S8.1 | 2021 | The Protection Of Electrostatic Discharge Susceptible Items – Symbols | ESD protective, and ESD common point ground symbols. The correct usage of symbols will eliminate confusion between symbols that indicate that an item or material is ESD susceptible and those that indicate that an item is designed to afford some degree of ESD protection. | Control – Electronics manufacturing, general industry | ESDA S8.1-2021 (registration required) | |
| ANSI/ESD STM2.1 | 2018 | Resistance Test Method for Electrostatic Discharge Protective Garments | Test methods for measuring the electrical resistance of garments used to control ESD. | Control – Apparel for electronics, cleanrooms | ESDA STM2.1-2018 (registration required) | |
| ANSI/ESD STM3.1 | 2015 | Standard Test Method for the Protection of Electrostatic Discharge Protective Workstations | Provides test methods for ESD protective worksurfaces. | Control – Electronics manufacturing | ESDA STM3.1-2015 (registration required) | |
| ANSI/ESD STM4.1 | 2017 | Standard Test Method for the Protection of Electrostatic Discharge Protective Footwear and Flooring Systems | Test methods for measuring the ESD protective footwear and flooring systems. | Control – Electronics manufacturing, cleanrooms | ESDA STM4.1-2017 (registration required) | |
| ANSI/ESD STM9.1 | 2022 | Standard Test Method for the Protection of Electrostatic Discharge Protective Wrist Straps | Test methods for measuring the ESD protective properties of wrist straps. | Control – Electronics manufacturing, general industry | ESDA STM9.1-2022 (free with registration) | |
| ANSI/ESD-S1.1 | 2021 | Wrist Straps | This document is intended for testing wrist straps and wrist strap systems used to ground personnel engaged in working with ESD sensitive assemblies and devices. It does not address monitoring systems or garments. | Control – Electronics manufacturing, general industry | ANSI/ESD S1.1 (registration required) | |
| ANSI/ESD-S13.1 | 2019 | Electrical Soldering/Desoldering Hand Tools | Provides electrical soldering/desoldering hand tool test methods for measuring current leakage, tip to ground reference point resistance, and tip voltage. | Control – Electronics manufacturing, general industry | ANSI/ESD S13.1 (registration required) | |
| ANSI/ESD-S6.1 | 2019 | ESD Association Standard For The Protection Of Electrostatic Discharge Susceptible Items – Grounding | Specifies the parameters, materials, equipment, and test procedures necessary to choose, establish, vary, and maintain an Electrostatic Discharge Control grounding system for use within an ESD Protected Area for protection of ESD susceptible items, and specifies the criteria for establishing ESD Bonding. | Control – Electronics manufacturing, general industry | ANSI/ESD S6.1 (registration required) | |
| ANSI/ESD-S8.1 | 2021 | The Protection Of Electrostatic Discharge Susceptible Items – Symbols | ESD susceptibility, ESD protective, and ESD common point ground symbols. The correct usage of symbols will eliminate confusion between symbols that indicate that an item or material is ESD susceptible and those that indicate that an item is designed to afford some degree of ESD protection. | Control – Electronics manufacturing, general industry | ANSI/ESD S8.1 (registration required) | |
| ANSI/ESD-STM11.11 | 2022 | Protection Of Electrostatic Discharge Susceptible Items – Surface Resistance Measurement Of Planar Materials | his standard test method defines the test procedure, equipment, sample preparation, and conditioning needed to achieve reproducible surface resistance measurements. | Control – Electronics manufacturing, general industry | ANSI/ESD STM11.11 (registration required) | |
| ANSI/ESD-STM12.1 | 2019 | Test Method For The Protection Of Electrostatic Discharge Susceptible Items – Seating – Resistance Measurements | test methods for measuring the electrical resistance of seating used for the control of electrostatic charge. This standard test method provides test methods for the qualification of seating prior to installation or application. | Control – Electronics manufacturing, general industry | ANSI/ESD STM12.1 (registration required) | |
| ANSI/ESD-STM7.1 | 2020 | Flooring Systems Resistive Characterization | Test Method for the Protection of Electrostatic Discharge Susceptible Items – Floor Materials – Resistive Characterization of Materials | Control – Electronics manufacturing, general industry | ANSI/ESD S7.1 (registration required) | |
| ANSI/ESD-STM9.1 | 2022 | Test Method For The Protection Of Electrostatic Discharge Susceptible Items – Footwear – Resistive Characterization | test method for measuring the electrical resistance of shoes used for ESD control in the electronics environment (not to include heel straps and toe grounders). | Control – Electronics manufacturing, general industry | ANSI/ESD S9.1 (registration required) | |
| ANSI/ESD-STM97.1 | 2015 | Test Method For The Protection Of Electrostatic Discharge Susceptible Items – Floor Materials And Footwear – Resistance Measurement In Combination with a Person | test methods for measuring the electrical system resistance of floor materials in combination with persons wearing static control footwear. | Control – Electronics manufacturing, general industry | ANSI/ESD STM97.1 (registration required) | |
| ANSI/ESD-STM97.2 | 2016 | Floor Materials And Footwear – Voltage Measurement In Combination with a Person | test method provides for measuring the electrostatic voltage on a person in combination with floor materials and footwear, as a system. | Control – Electronics manufacturing, general industry | ANSI/ESD STM97.2 (registration required) | |
| JESD625C.01 | 2024 | Requirements for Handling Electrostatic-Discharge-Sensitive (ESDS) Devices | standard applies to devices susceptible to damage by electrostatic discharge greater than 100 volts human body model (HBM) and 200 volts charged device model (CDM). | Control – Semiconductor manufacturing | JESD625C.01 (registration required) | |
| AEC Q100-002 | 2013 | HUMAN BODY MODEL ELECTROSTATIC DISCHARGE TEST | Automotive Electronics Council (AEC) Requirements for Human Body Model (HBM) ESD Qualification Testing, part of the AEC Q100 set of standards | Testing – Automotive, Semiconductor manufacturing | AEC Q100-002 E (free with registration) | |
| AEC Q100-011 | 2019 | CHARGED DEVICE MODEL (CDM) ELECTROSTATIC DISCHARGE TEST | Automotive Electronics Council (AEC) Requirements for Charged Device Model (CDM) ESD Qualification Testing, part of the AEC Q100 set of standards | Testing – Automotive, Semiconductor manufacturing | AEC Q100-011 D (free with registration) | |
| ANSI/ESD STM5.5.1 | 2022 | Standard Test Method For Electrostatic Discharge (ESD) Sensitivity Testing – Transmission Line Pulse (TLP) – Component Level | Transmission Line Pulse (TLP) testing techniques of semiconductor components. The purpose of this document is to establish a methodology for both testing and reporting information associated with TLP testing. | Testing – Semiconductor manufacturing | ESDA STM5.5.1-2022 (registration required) | |
| IEC 61000-4-2 | 2008 | Electromagnetic compatibility (EMC) – Part 4-2: Testing and measurement techniques – Electrostatic discharge immunity test | Specifies testing conditions and performance standards for ESD immunity of electrical and electronic equipment. | Testing – Electronics, appliances, industrial equipment | IEC 61000-4-2 (registration required) | |
| ISO 10605 | 2023 | Road vehicles — Test methods for electrical disturbances from electrostatic discharge | Specifies the electrostatic discharge (ESD) test methods necessary to evaluate electronic modules intended for vehicle use | Testing – Automotive industry | ISO 10605:2023 | |
| JEDEC JS-001 | 2023 | Human Body Model (HBM) – Component Level | Joint JEDEC/ESDA standard for Human Body Model (HBM) ESD testing of semiconductor devices. | Testing – Semiconductor manufacturing | JEDEC JS-001 (free with registration) | |
| JEDEC JS-002 | 2022 | Charged Device Model (CDM) – Component Level | Joint JEDEC/ESDA standard for Charged Device Model (CDM) ESD testing of semiconductor devices. | Testing – Semiconductor manufacturing | JEDEC JS-002 (free with registration) | |
| MIL-STD-1686 | 1995 | Electrostatic Discharge Control Program for Protection of Electrical and Electronic Parts, Assemblies and Equipment | Specifies ESD control methods for military applications, ensuring high reliability in critical environments | Military, aerospace | STG: MIL-STD-1686 |
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